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AM Areal confocal 3D microsensor


New generation fully autonomous confocal 3D microscopic sensor/probe
Areal l scanning, cross-scale, true color, Rapid imaging

Product Features

  ● New generation fully autonomous confocal 3D microscopic sensor/probe

  ● Surface scanning, cross-scale, true color, fast imaging

  High Efficiency:Array imaging, faster speed

  High Flexibility:Range, accuracy, and speed can be flexibly configured according to the application scenario

  High Adaptability:Adaptable to smooth surfaces, complex surfaces, highly reflective materials, and transparent materials

  Easy Integration:Open SDK, small size

  Low Maintenance Cost:Remote parameter adjustment, remote SDK updates, stable and reliable LED light source with long lifespan

Demonstration Diagram

 

Product Introduction 

Cross-scale, cross-platform applicability

==>

Desktop 3D microscope, non-contact roughness meter, desktop 3D profiler, automated 3D measurement equipment, 3D AOI

Traditional Technology Products

 

Application Types

①Super-depth microscope 

②Digital 3D microscope 

③Laser confocal 3D microscope 

④White light interferometer

<==substitute

applications==>

①Defect detection 

②Critical dimension measurement 

③Surface profile analysis 

④Roughness detection 

⑤Transparent film thickness detection

 ...

 

Model Name

AM 100 (Large Range)

AM 10 (High Precision)

AM 1 (Ultra-high Precision)

Principle

wide-field confocal

wide-field confocal

wide-field confocal

Axial Scanning Device

Motor

PZT+motor

PZT+motor

Light Source

LED

LED

LED

Axial accuracy (μm)

0.1

0.01 (PZT), 0.1 (Motor)

0.001 (PZT), 0.1 (Motor)

Range(μm)

30000

500 (PZT), 30000 (Motor)

400 (PZT), 30000 (Motor)

Typical Imaging Time(s)

3

3 (Motor) ~ 7 (PZT)

3 (Motor) ~ 7 (PZT)

Size (HxWxD) mm

490 x 200 x 185

510 x 200 x 185

510 x 200 x 185

Weight (kg)

10

10

10

Output

3D point cloud, 2D color map

3D point cloud, 2D color map

3D point cloud, 2D color map

Objective

10X

20X

50X

Optional Objective

Microscopicobjective magnification2X5X10X20X50X100X150X
Numerical aperture(NA)0.0550.140.280.420.80.90.9
Working distance (mm)3436.53420111.5
Measurement XY Field of View(mm)5.60 × 3.502.24 × 1.401.12 × 0.700.56 × 0.350.22 × 0.140.11 × 0.070.07 × 0.04
Measurement XY Point Interval(μm)2.9301.1720.5860.2930.1170.0590.039

Note

①Limited by the objective lens working distance, the maximum range is 30mm; motor stroke 100mm;

②Calculated based on 100 axial positions;

③Sensor weight does not include Z motor, motor weight 6kg;

④The sensor does not include an objective lens as standard; choose an objective lens according to your needs

⑤AM10 and AM1 do not include a Z motor as standard; a 100mm motor can be optionally added as needed

Case

Solar cell silicon suede pyramid, grid line measurement

PV application: Solar cell silicon suede pyramid, grid line measurement

Back bore hole depth measurement, up to 8mm deep hole

High-end PCB manufacturing:back drilling Application: Back bore hole depth measurement, up to 8mm deep hole

High-end IC carrier bore hole depth measurement

High-end PCB manufacturing:Laser drilling of IC substrate application: High-end IC carrier bore hole depth measurement

Measurement of the depth and width of the cutting groove after the wafer laser cutting

OSAT (Front-End) application: Measurement of the depth and width of the cutting groove after the wafer laser cutting

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